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Handbook of Sputter Deposition Technology
Faetures a team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. This book introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.
1 540,00 DH
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Faetures a team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. This book introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.
| ISBN / EAN | 9781437734836 |
|---|---|
| Auteur | Wasa, Kiyotaka (Matsushita Electric, Ltd. and Yokohama City University, Japan) |
| Editeur | William Andrew Publishing |