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Manufacturing Techniques for Microfabrication and Nanotechnology

Auteur: Madou, Marc J. (University of California, Irvine, USA)
Editeur: Taylor & Francis Inc
Focuses on various trends in industrial lithography and pattern transfer. This book covers photo lithography and next generation lithographies and presents a number of subtractive etching techniques, including dry, chemical, and electrochemical wet. It explains thermal, electro thermal, and mechanical removing techniques.
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Focuses on various trends in industrial lithography and pattern transfer. This book covers photo lithography and next generation lithographies and presents a number of subtractive etching techniques, including dry, chemical, and electrochemical wet. It explains thermal, electro thermal, and mechanical removing techniques.
ISBN / EAN 9781420055191
Auteur Madou, Marc J. (University of California, Irvine, USA)
Editeur Taylor & Francis Inc