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MEMS and MOEMS Technology and Applications
Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component).
1 270,00 DH
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Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component).
| ISBN / EAN | 9780819495983 |
|---|---|
| Auteur | Rai-Choudhury, Prosenjit |
| Editeur | SPIE Press |