MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications

Explores the potential of using MEMS and NT in sensors and devices. This book describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. It encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, and photonic bandgap devices.